2006 Publications

Journal Papers

1. T. Luo and A. Khursheed, “Second-order aberration corrected electron energy loss spectroscopy attachment for scanning electron microscopes”, Review of Scientific Instruments 77, 043103 (2006)
    

2. A. Khursheed, K. Nelilyan and Y. Ding, “Nanoscale imaging with a portable field emission scanning electron microscope”, Microelectronic Engineering 83, (2006), pp 762-766
    

3. A. Khursheed and M. Osterberg, “Developments in the design of a spectroscopic scanning electron microscope”, Nuclear Instruments and Methods in Physics Research A 555, (2006), pp 437-444

 

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Conference Papers

1. A. Khursheed and D. Yu, “Simulation of a time-of-flight electron emission microscope (TOFEEM”, Seventh International Conference on Charged Particle Optics, CPO-7, Trinity College, Cambridge, England, July 25^th-28^th, 2006-08-29


 

2. M. Osterberg and A. Khursheed, “Initial results on the spectroscopic SEM concept”, Seventh International Conference on Charged Particle Optics, CPO-7, Trinity College, Cambridge, England, July 25^th-28^th, 2006-08-29


 

3. T, Luo and A. Khursheed, “Elemental identification using transmitted and backscattered electrons in the SEM”, Seventh International Conference on Charged Particle Optics, CPO-7, Trinity College, Cambridge, England, July 25^th-28^th, 2006-08-29


 

4. H. Q. Hoang and A. Khursheed, “Redesign of the scanning electron microscope for parallel energy spectral acquisition”, Seventh International Conference on Charged Particle Optics, CPO-7, Trinity College, Cambridge, England, July 25^th-28^th, 2006-08-29


 

5. H. Q. Hoang, J. Wu, M. Osterberg, and A. Khursheed, “Direct ray tracing of electrons through curved magnetic sector plates”,  edited by I. Mullerova, pp 29-30, Brno, Czech Republic: Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, July 2006. Paper presented at the: 10^th seminar on the Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, July 2006, Skalsky, Brno, Czech Republic. 
    

6. A. Khursheed and D. Yu, “Simulated performance of a time-of-flight electron emission microscope”,  edited by I. Mullerova, pp 39-40, Brno, Czech Republic: Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, July 2006. Paper presented at the: 10^th seminar on the Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, July 2006, Skalsky, Brno, Czech Republic. 

 

 

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2000-2005 Publications

Journal Papers

1. A. Khursheed, “Dynamic chromatic correction in low energy electron microscopes”, J. Vac. Sci. Technol. B 23(6), (2005), p2749-2753


 

2. M. Osterberg and A. Khursheed, “Simulation of magnetic sector deflector aberration properties for low-energy electron microscopy”, Nuclear Instruments and Methods in Physics Research A 555, (2005), pp 20-30
    

3.  A. Khursheed, “Amethod of dynamic chromatic aberration correction in low voltage scanning electron microscopes”, Ultramicroscopy 103, (2005), pp 225-260
    

4.  A. Khursheed, “Spectroscopic scanning electron microscope”, Scanning, 26, (2004), pp 296-306
    

5. A. Khursheed, N. Karuppiah, M. Osterberg, and J. T. L. Thong, “Add-on transmission attachments for the scanning electron microscope”, Review of  Scientific  Instruments, Vol. 74, No. 1, Jan. 2003, pp. 134-140
    

6. A. Khursheed, “A low voltage time of flight electronemission microscope”, Optik, Vol. 133, No. 11, (Dec. 2002), p505-509.
    

7. A. Khursheed, “Aberration characteristics of immersion lenses for LVSEM”, Ultramicroscopy, 93 (2002), p331-338
    

8. A. Khursheed  and K. Nelliyan, “A high resolution mixed field immersion lens attachment for conventional scanning electron microscopes”, Review of Scientific Instruments, 73, no. 8 (August 2002), 2906-2909.
    

9. A. Khursheed, “Ultimate resolution limits for scanning electron microscope immersion objective lenses”, Optik, Vol. 113, No. 2, (2002), p67-77
    

10. E. I. Rau, A. Khursheed, A. V. Gostev, and M. Osterberg, “Improvements to the design of an electrostatic toroidal backscattered electron spectrometers for the scanning electron microscope”, Review of Scientific Instruments, Volume 73, Number 1, 2002, p227-9
     

11. A. Khursheed, N. Karuppiah, and S. H. Koh, “A high resolution add-on in-lens attachment for scanning electron microscopes”,  Scanning, Vol. 23, 2001, p204-210
     

12. A. Khursheed, Z. Yan and N. Karuppiah, "Permanent magnet objective lenses for multicolumn electron beam systems", Review of Scientific Instruments, Vol. 72, No. 4, April 2001, p2106-2109


 

13. A. Khursheed and N. Karuppiah, "An add-on secondary eletron energy spectrometer for scanning electron microscopes", Review of Scientific Instruments, Vol. 72, No. 3, March 2001, p1708-1714
     

14. A. Khursheed, “Magnetic axial field measurements on a high resolution miniature scanning electron microscope”, Review of Scientific Instruments, Vol. 71, No. 4,  April 2000,  p1712-5


 

15. Y. Zhao and A. Khursheed, “General condition for moving objective lens (MOL) with combined electrostatic and magnetic fields”, Optik 110, No. 12, 1999, p563-8
     

16. Y. Zhao and A. Khursheed, “Variable axis lens of mixed electrostatic and magnetic fields and its application in electron-beam lithography systems”, J. Vac. Sci., B 17 (6), Nov/Dec 1999, p2795-8
     

17. A. Khursheed, “Portable scanning electron microscope designs”, Journal of Electron Microscopy, 47 (6), 1998, p591-602
     

18. A. Khursheed, J. C. Phang, J. T. L. Thong, “A portable scanning electron microscope column design based on the use of permanent magnets”, Scanning, Vol. 20, No. 2, 1998, p87-91
     

19. Y. Zhao and A. Khursheed, “An on-pole tip deflector for high resolution, low voltage scanning electron microscopes”, Scanning, Vol. 20, No. 1, Feb. 1998, p10-16


 

20. A. Khursheed, “Mesh refinement for the finite element method in electron optics”, Optik, Vol. 107, No. 3, 1998, p99-108
     

21. A. Khursheed and S. P. Goh, “Experimental investigation into the use of micro-extraction fields for electron beam testing”, Microelectronic Engineering, Vol. 37, 1997, p171-185


 

22. A. Khursheed, “Curvilinear finite element mesh generation for electron gun simulation”, Scanning, Vol. 19, 1997, p300-308
     

23. A. Khursheed, 'Scanning electron microscope design for quantitative multi-contrast', Scanning, Vol. 18, 1996, p81-91

 

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Conference Papers

1. A. Khursheed, H. O. Moser and A. D. Trigg, “A time of flight electron emission microscope (TOFEEM) for the inspection and characterization of nanostructures”, In MRS-S National Conference on Advanced Materials, 6^th August 2004, IME Singapore, pp 8-9 Proceedings.
    

2. J. Jinhua and A. Khursheed, “A 2D interactive mesh generator for finite element programs”,  edited by I. Mullerova, pp 35-36, Brno, Czech Republic: Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, July 2004. Paper presented at the: Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, July 2004, Skalsky, Brno, Czech Republic. 
    

3. M. Osterberg and A. Khursheed, “An add-on spectrometer/lens-sector plate attachment for the SEM”,  edited by I. Mullerova, pp 55-56, Brno, Czech Republic: Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, July 2004. Paper presented at the: Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, July 2004, Skalsky, Brno, Czech Republic. 
    

4. A. Khursheed, “A Spectroscopic scanning electron Microscope”, edited by I. Mullerova, pp 39-40, Brno, Czech Republic: Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, July 2004. Paper presented at the: Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, July 2004, Skalsky, Brno, Czech Republic. 
    

5. A. Khursheed,  “Permanent magnet attachments for the SEM”, edited by L. Frank, pp 83-6, Brno, Czech Republic: Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, July 2002. Paper presented at the: Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, July 2002, Skalsky, Brno, Czech Republic.
    

6. A. Khursheed, N. Karuppiah and S. H. Koh, "A high resolution add-on lens for scanning electron microscopes", 12^th European Congress on Electron Microscopy, edited by  P. Tomnek and R. Kolarik, July 2000, pp 431.


 

7. A. Khursheed, N.  Karuppiah and S.H Koh,  “A High Resolution Add-on lens for Scanning Electron Microscopes”, 7^th Asia-Pacific Electron Microscopy Conference, pp 78-9, Singapore Times publishing group, July 2000.
    

8. Y. Zhao and A. Khursheed,  “An immersion objective lens with an integrated on-the-tip deflector", 7^th Asia-Pacific Electron Microscopy Conference, pp 80-1, Singapore Times publishing group, July 2000.

9. N.  Karuppiah, Z. Yan, and A. Khursheed,  “Field Measurements on a Portable Permanent Magnet Scanning Electron Microscope Column”, 7^th Asia-Pacific Electron Microscopy Conference, pp 74-5, Singapore Times publishing group, July 2000.

 

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 1996-1999 Publications

 Journal Papers

1. Y. Zhao and A. Khursheed, “General condition for moving objective lens (MOL) with combined electrostatic and magnetic fields”, Optik 110, No. 12, 1999, p563-8
    

2.  Y. Zhao and A. Khursheed, “Variable axis lens of mixed electrostatic and magnetic fields and its application in electron-beam lithography systems”, J. Vac. Sci., B 17 (6), Nov/Dec 1999, p2795-8
    

3. A. Khursheed, “Portable scanning electron microscope designs”, Journal of Electron Microscopy, 47 (6), 1998, p591-602
    

4. A. Khursheed, J. C. Phang, J. T. L. Thong, “A portable scanning electron microscope column design based on the use of permanent magnets”, Scanning, Vol. 20, No. 2, 1998, p87-91
    

5. Y. Zhao and A. Khursheed, “An on-pole tip deflector for high resolution, low voltage scanning electron microscopes”, Scanning, Vol. 20, No. 1, Feb. 1998, p10-16  


 

6. A. Khursheed, “Mesh refinement for the finite element method in electron optics”, Optik, Vol. 107, No. 3, 1998, p99 108
    

7. A. Khursheed and S. P. Goh, “Experimental investigation into the use of micro-extraction fields for electron beam testing”, Microelectronic Engineering, Vol. 37, 1997, p171-185
    

8. A. Khursheed, “Curvilinear finite element mesh generation for electron gun simulation”, Scanning, Vol. 19, 1997, p300-308
    

9. A. Khursheed, 'Scanning electron microscope design for quantitative multi-contrast', Scanning, Vol. 18, 1996, p81-91

 

 

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Conference Papers

1. A. Khursheed, N. Karuppiah, and S. H. Koh, “A high resolution lens attachment for SEMs”, Scanning conference 2000, USA, Scanning, 22, no. 2, p113-4

2. A. Khursheed and Y. Zhao, “Hall probe measurements for the portable scanning electron microscope”, Proceedings of the Symposium on Charged Particle Optics, invited paper, Tsukuba, Japan, October 1998, p27-31


 

3. Y. Zhao and A. Khursheed, “Comparative study on magnetic variable axis lenses using electrostatic and magnetic in-lens deflectors”, SPIE Charged Particle Optics IV, Vol. 3777, 1999, p107-114


 

4. Z. Aiming and A. Khursheed, “Accurate ray tracing through finite element solved potential distributions in charged particle optics”, SPIE Charged Particle Optics IV, Vol. 3777, 1999, p24-34
    

5. A. Khursheed, “Construction and design of a high resolution portable scanning electron microscope”, SPIE Charged Particle Optics IV, Vol. 3777, 1999, p116-124
    

6. A. Khursheed, “Axial field measurements on a high resolution portable scanning electron microscope column”, Proceedings of the 11^th International Conference on Microscopy of Semiconducting Materials, Oxford, England, March 1999, to be published
    

7. A. Khursheed, J. T. L. Thong, and J. C. Phang, “Miniiature scanning electron microscope design based upon the use of permanent magnets”, paper presented at the Charged particle optics III part of the  SPIE 97 conference, July 1997, San Diego, SPIE Vol. 3155, 1997, p175-184
    

8. A. Khursheed, “Mesh refinement for the finite element method in electron optics”, paper presented at the Charged particle optics III part of the  SPIE 97 conference, July 1997, San Diego, SPIE Vol. 3155, 1997, p100-112
    

9. Z. Yan and A. Khursheed, “In-lens deflectors for a LVSEM magnetic immersion objective lens”, paper presented at the Charged particle optics III part of the  SPIE 97 conference, July 1997, San Diego, SPIE Vol. 3155, 1997, p37-46
    

10.  A. Khursheed and Y. Pei, ‘Quasi-conformal finite-element mesh generation for electron gun simulation”, Charged particle optics II, part of the  SPIE 96 conference, August 1996, Denver, SPIE Vol. 2858, 1996, p13-23
     

11. A. Khursheed, ‘High-order interpolation methods for finite element solved potential distributions in the two-dimensional rectilinear coordinate system”, Charged particle optics II, part of the  SPIE 96 conference, August 1996, Denver, SPIE Vol. 2858, 1996, p115-125 

 

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Patents (1996-2006)

1. Khursheed A, Phang JCH, and Thong JTL, “A portable high resolution scanning electron microscope column design using permanent magnet electron lenses”, filed in Singapore 1997, and the USA 1998
    

2. Khursheed A, “Lens for a scanning electron microscopes”, US Patent 6,906,335 B2
    

3. A. Khursheed and JTL Thong, “Converting Scanning Electron Microscopes”, US Patent 6,891,159 B2


 

4. A. Khursheed, “Reducing chromatic aberration in images formed by emission electrons”, US Patent 6,897,441
    

5. A. Khursheed, “Spectroscopic SEM”, US Patent filed
    

6. A. Khursheed, “A multi-beam spectramicroscope”, filed in Singapore